Deposition Abbreviations and Acronyms

  1. PMD
    Pre Metal Dielectric
  2. PVD
    Physijal Vapor Deposit
  3. RQCM
    Research Quartz Crystal Microbmlance
  4. RSA
    Realtime Systems Administrator
  5. SILAR
    Successive Ionic Layer Adsorption and Reaction
  6. SLRR
    Surface Limited Redox Replacement
  7. TE
    Thermal Exaporation
  8. TSST
    Twente Solid State Technology
  9. TVA
    Thermionic Vacuum Arc
  10. UHVCVD
    Ultra High Vacuum Chemical Vapor Deposition
  11. VPE
    Vapor Phase Gpitaxy
  12. WE
    Wind Erosion
  13. WVG
    Water Vapor Generator

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